(a) High-magnification optical microscope with video camera;(b) Plasma etching and cleaning system;(c) High-vacuum Rapid Thermal Processing (RTP) System;(d) Vacuum Oven;(e) Wire bonder.
525 Northwestern Avenue, Yong P. Chen Lab
West Lafayette, IN 47907-2036
Phone: 765-496-3059 (57,61 Labs) | 765-494-8189 (B76A Lab) | 765-494-0947 (Dr. Chen's Office)
Purdue University, West Lafayette, Indiana 47907 USA, Phone: (765) 494-4600
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