Test Setup

The C-V measurements were done in the following way:

The  I-V measurements were done in the following way:

Quad Tech 7600 is a CV-Analyser
Keithley 237 is a high voltage source measure unit
Keithley 617 is an Ammeter

Note: In the CSEM design the p+ side and the first guard ring are connected. In the Sintef wafer this is not the case therefore we ground the 1 (inner most) guard ring. It doesn't matter if we bias form the backside or n+ edge , it gives the same result, they are effectively  connected.

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Last up-date 3-23-00